G.M. Wallraff, D. Medeiros, et al.
Microlithography 2005
Copper-carbon films formed by photodeposition from a vapor-phase copper-organic compound by use of a cw ultraviolet laser beam exhibit periodic ripple structures associated with surface waves. Microscopic analysis of these films shows that composition and order also vary periodically and change abruptly on dimensional scales small compared to optical wavelengths. A simple model including strongly varying fields appropriate to the film corrugation is proposed to explain these unusual features. © 1985 The American Physical Society.
G.M. Wallraff, D. Medeiros, et al.
Microlithography 2005
F.A. Houle
The Journal of Chemical Physics
Scott L. Anderson, F.A. Houle, et al.
The Journal of Chemical Physics
F.A. Houle
Proceedings of SPIE 1989