Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
The problem of preventing quasi-catastrophic error propagation in maximum-likelihood and reduced-state sequence detection for multilevel partial-response channels with transfer functions (1 − DP) and (1 + DP) is studied. M-ary channel input sequences that limit the length of minimum distance error events to L symbols are exhaustively characterized by finite-state transition diagrams. An efficient procedure for computing the capacity associated with these transition diagrams is given. Efficient constrained codes that can be readily implemented by finite-state encoders and block decoders with small error propagation are constructed. © 1995 IEEE
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
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IS&T/SPIE Electronic Imaging 1996
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INTERSPEECH - Eurospeech 2001