A. Skumanich
SPIE OE/LASE 1992
Paper
Cr Stability of periodic solutions and solution schemes
Abstract
No abstract available.
Related
Juliann Opitz, Robert D. Allen, et al.
Microlithography 1998
L Auslander, E Feig, et al.
Advances in Applied Mathematics
Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007