Conference paper
Single and dual wavelength exposure of photoresist
J. LaRue, C. Ting
Proceedings of SPIE 1989
J. LaRue, C. Ting
Proceedings of SPIE 1989
Martin Charles Golumbic, Renu C. Laskar
Discrete Applied Mathematics
George Markowsky
J. Math. Anal. Appl.
Sankar Basu
Journal of the Franklin Institute