Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
A general method for the synthesis of mixed sulfur-selenium analogs of bis(ethylenedithio)tetrathiafulvalene (ET) starting with tetrathiafulvalene (TTF) is described. Protecting the tetraseleno-TTF intermediate with trimethylsilylethoxymethyl (SEM) groups provided the key intermediate for the synthesis of ET analogs having the selenium atoms in the outer rings on a tetrathiafulvalene center. © 1987.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
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JES
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MRS Spring Meeting 1993
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