Scott K. Reynolds
IEEE Journal of Solid-State Circuits
We have studied the chemical vapor deposition of copper from 1,5-cyclooctadiene Cu(I) hexafluoroacetylacetonate, a moderately volatile yellow cystalline solid. It yields pure copper by pyrolytic decomposition at 150-250 °C, produces copper films with near bulk resistivity, and has the advantage of being air stable at room temperature.
Scott K. Reynolds
IEEE Journal of Solid-State Circuits
Ullrich R. Pfeiffer, Scott K. Reynolds, et al.
RFIC 2004
Ullrich R. Pfeiffer, David Goren, et al.
ESSCIRC 2005
Sudipto Chakraborty, Scott K. Reynolds, et al.
IMS 2003