Characterizing probe performance in the aberration corrected STEM

Abstract

Sub-Ångstrom imaging using the 120 kV IBM STEM is now routine if the probe optics is carefully controlled and fully characterized. However, multislice simulation using at least a frozen phonon approximation is required to understand the Annular Dark Field image contrast. Analysis of silicon dumbbell structures in the [1 1 0] and [2 1 1] projections illustrate this finding. Using fast image acquisition, atomic movement appears ubiquitous under the electron beam, and may be useful to illuminate atomic level processes. © 2006 Elsevier B.V. All rights reserved.