Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
An approach to enlarge the range of functional cyclic carbonates by introducing a reversible addition-fragmentation chain transfer (RAFT) agent either as initiator or monomer was presented. After a 1 hr reaction time, a well-defined PLLA macroinitiator was obtained with retention of the trithiocarbonate group. The results show that a decrease in initial monomer concentration from 2 to 1 mol L -1 produces well-defined and narrowly dispersed copolymers. Comparing gel permeation chromatography (GPC) traces from the refractive index (RI) with UV-vis detectors demonstrates the complete incorporation of the 4-pyrene-1-butanol initiator in the polymer chain and the narrow molecular weight distribution. The results also show a conservation of 94% obtained from the relative intensity of acrylate protons at 5.5 ppm and amide methie protons from the repetitive units at 3.9 ppm.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Mitsuru Ueda, Hideharu Mori, et al.
Journal of Polymer Science Part A: Polymer Chemistry
M.A. Lutz, R.M. Feenstra, et al.
Surface Science
U. Wieser, U. Kunze, et al.
Physica E: Low-Dimensional Systems and Nanostructures