Publication
CICC 1997
Conference paper

Backside optical emission diagnostics for excess IDDQ

Abstract

Backside optical emission was used to diagnose excess quiescent current in a multi-million gate microprocessor. Emission images showed the current was due to FET's improperly set in a conducting state. The utility of backside optical emission for IC diagnostics is discussed, and requirements for optical detectors and sample preparation are considered.

Date

Publication

CICC 1997

Authors

Share