A. Krol, C.J. Sher, et al.
Surface Science
The atomic structure of the Al–Si epitaxial interface has been investigated by high-resolution transmission electron microscopy combined with computer image-simulation techniques. A stable epitaxial structure was observed at the Al(111)–Si(111) interface with a matching of four Al to three Si lattice planes, corresponding to a misfit of 30%. The formation of an epitaxial interface with such a large misfit is unexpected and its Occurrence can be attributed to the optimum energy of this interface. Atomic models consistent with these observations are proposed. © 1986 Taylor & Francis Group, LLC.
A. Krol, C.J. Sher, et al.
Surface Science
J.A. Barker, D. Henderson, et al.
Molecular Physics
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989