Khalid Abdulla, Andrew Wirth, et al.
ICIAfS 2014
It is possible under favorable circumstances to identify composition, bonding, and electronic structure with atomic resolution in microelectronic device structures. In current device structures, where only a few interface atoms can dominate the performance of a device, this can contribute important understanding relevant to product development. This paper is a brief overview of work in our laboratory using scanning transmission electron microscopy to achieve such capabilities.
Khalid Abdulla, Andrew Wirth, et al.
ICIAfS 2014
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Pradip Bose
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