Publication
SPIE Advanced Optical Technologies 1993
Conference paper

Atomic force microscopy experimentation at surfaces: Hardness, wear and lithographic applications

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Abstract

This chapter reviews the experimental techniques for surface modification using an atomic force microscope. The numerous examples presented demonstrate the ability of these methods to contribute to our knowledge of interface physics in various fields. Fundamental structural and dynamical behaviour of surfaces and adsorbates can be studied in detail, with implications to material science and technology. In the conclusion the future impact of even more sophisticated atomic force microscopy techniques is discussed as related to this rapidly growing field of research.