Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
No abstract available.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
M.F. Cowlishaw
IBM Systems Journal
Thomas M. Cheng
IT Professional
Leo Liberti, James Ostrowski
Journal of Global Optimization