Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
No abstract available.
Hans Becker, Frank Schmidt, et al.
Photomask and Next-Generation Lithography Mask Technology 2004
Yigal Hoffner, Simon Field, et al.
EDOC 2004
Preeti Malakar, Thomas George, et al.
SC 2012
David S. Kung
DAC 1998