Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thin polymer films with cylindrical microdomains of controlled size were produced from diblock copolymer/homopolymer mixtures. It was demonstrated that not only do the spatial order and orientation of the domains remain unperturbed but also that two distinct sizes of pores can be accessed from the same film.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Surendra B. Anantharaman, Joachim Kohlbrecher, et al.
MRS Fall Meeting 2020
Biancun Xie, Madhavan Swaminathan, et al.
EMC 2011
David B. Mitzi
Journal of Materials Chemistry