Conference paper
Characterization of line width variation
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Alfred K. Wong, Antoinette F. Molless, et al.
SPIE Advanced Lithography 2000
Joy Y. Cheng, Daniel P. Sanders, et al.
SPIE Advanced Lithography 2008
Nimrod Megiddo
Journal of Symbolic Computation
Michael Ray, Yves C. Martin
Proceedings of SPIE - The International Society for Optical Engineering