William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
We report detection of forces as small as 1.4 × 10-18 N in a 1 Hz bandwidth using ultrathin silicon cantilevers operating at liquid helium temperatures. Cantilever fabrication, the importance of surface cleanliness and various measurement issues are discussed. Tip-surface interactions are described, including the detection of single electron trapping-untrapping events. Applications of attonewton force detection for single spin magnetic resonance force microscopy (MRFM) and ultrasensitive magnetometry are discussed. © Springer-Verlag 2001.
William Hinsberg, Joy Cheng, et al.
SPIE Advanced Lithography 2010
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
T.N. Morgan
Semiconductor Science and Technology
F.J. Himpsel, T.A. Jung, et al.
Surface Review and Letters