Michiel Sprik
Journal of Physics Condensed Matter
Michiel Sprik
Journal of Physics Condensed Matter
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Hiroshi Ito, Reinhold Schwalm
JES
S.F. Fan, W.B. Yun, et al.
Proceedings of SPIE 1989