Zelek S. Herman, Robert F. Kirchner, et al.
Inorganic Chemistry
Paper
Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching
Abstract
Far-ultraviolet light (185 nm) rapidly etches poly(ethylene terephthalate) films without any subsequent processing. Both non-oxidative and oxidative mechanisms are operative. © 1982.
Related
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry
I.K. Pour, D.J. Krajnovich, et al.
SPIE Optical Materials for High Average Power Lasers 1992
J.R. Thompson, Yang Ren Sun, et al.
Physica A: Statistical Mechanics and its Applications