Action of far-ultraviolet radiation (185 nm) on poly(ethylene terephthalate) films: a method for controlled dry-etching

Gregory Czap, Kyungju Noh, et al.

APS Global Physics Summit 2025

Frank Stem

C R C Critical Reviews in Solid State Sciences

Thomas H. Baum, Carl E. Larson, et al.

Journal of Organometallic Chemistry

Michael Ray, Yves C. Martin

Proceedings of SPIE - The International Society for Optical Engineering