E. Babich, J. Paraszczak, et al.
Microelectronic Engineering
Paper
A theoretical study of the growth of metals on silicon
Abstract
The structures of ordered overlayers of alkali and simple metals on Si(001)-2 × 1 are studied theoretically. Comparative studies enable us to understand bonding and stability of Peierls distorted structures. Results deduced from computed total energies are employed to explain some selected experimental observations. © 1992.
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