Y.H. Shih, M.H. Lee, et al.
IEDM 2009
It is well known that chemical etching of strontium titanate (SrTiO3) results in titanium-terminated (B site) surfaces. In this letter, we describe a facile method for generating strontium-terminated surfaces in SrTiO3. We demonstrate that a substrate treatment consisting of a low-power oxygen ashing followed by annealing yields a strontium (A site)-terminated surface in single-crystal SrTiO3 (100). This surface termination of the substrate allows the deposition of cuprate films with improved quality. © 2001 American Institute of Physics.
Y.H. Shih, M.H. Lee, et al.
IEDM 2009
Q. Huang, S.W. Bedell, et al.
Electrochemical and Solid-State Letters
T.D. Happ, M. Breitwisch, et al.
VLSI Technology 2006
M. Freitag, Y. Martin, et al.
Nano Letters