PublicationDevice Research Conference 1993Conference paperA-Si thin film transistors using dilute-gas plasma-enhanced chemical vapor depositionDevice Research Conference 1993View publicationAbstractNo abstract available.Home↳ PublicationsDate21 Jun 1993PublicationDevice Research Conference 1993AuthorsS.L. WrightM.B. RothwellJ.H. SoukY. KuoIBM-affiliated at time of publicationShare
