Lactones in 193 nm resists: What do they do?
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
A new sparse approximate triangular factorization technique for solving large sparse linear system by iterative methods is proposed. The method is based on the description of the triangular factorization of a matrix as a product of elementary matrices and provides a general scheme for constructing incomplete preconditioners for the given matrix. In particular, the familiar incomplete Choleski decomposition can be incorporated into this scheme. The algorithm, based on choice by value, compares favorably with the incomplete Choleski preconditioner and, equipped with a user-controlled parameter, is able to tackle extremely ill-conditioned problems arising in structural analysis, semiconductor simulation, oil-reservoir modelling, and other applications. When applied to a positive definite symmetric matrix, the algorithm produces a preconditioning matrix preserving that property. © 1991.
Hiroshi Ito, Hoa D. Truong, et al.
SPIE Advanced Lithography 2008
T. Graham, A. Afzali, et al.
Microlithography 2000
Elizabeth A. Sholler, Frederick M. Meyer, et al.
SPIE AeroSense 1997
R.A. Toupin
Archive for Rational Mechanics and Analysis