About cookies on this site Our websites require some cookies to function properly (required). In addition, other cookies may be used with your consent to analyze site usage, improve the user experience and for advertising. For more information, please review your options. By visiting our website, you agree to our processing of information as described in IBM’sprivacy statement. To provide a smooth navigation, your cookie preferences will be shared across the IBM web domains listed here.
Publication
MECH 2013
Conference paper
A high-speed electromagnetically-actuated scanner for dual-stage nanopositioning
Abstract
This paper presents the mechanical design, finite element simulations and experimental verification of an electromagnetically-actuated uniaxial high-speed nanopositioner. The nanopositioner is designed specifically as a fast, short-range scanner for a dual-stage nanopositioning system. To that end, the scanner has high linearity owing to its electromagnetic actuation and well-defined dynamic behavior over a large bandwidth. There was significant emphasis on reducing the mechanical and thermal coupling from the actuation block. Using model-based feedback controllers with direct shaping of the closed-loop noise transfer function, experimental results are presented in which the scanner is integrated in a dual-stage nanopositioning system and used for high-speed imaging in a custom-built atomic force microscope. © 2013 IFAC.