A computer calculation of step coverage in SiO thin films

Paper

12 Mar 1982

Abstract

No abstract available.

Paper

J.C. Marinace

JES

Conference paper

L.K. Wang, A. Acovic, et al.

MRS Spring Meeting 1993

Paper

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Micro and Nano Engineering

Paper

C.M. Brown, L. Cristofolini, et al.

Chemistry of Materials