A comparison of grain size measurements in Al-Cu thin films: Imaging verses diffraction techniques

Paper

01 Aug 2002

Abstract

No abstract available.

Conference paper

Qinghuang Lin, Chuck Black, et al.

Microlithography 2003

Paper

K.P. Rodbell, L. Gignac, et al.

Journal of Applied Physics

Paper

Huan Hu, Bin Shi, et al.

Langmuir

Conference paper

Aaron D. Franklin, Shu-Jen Han, et al.

IEDM 2011