Conference paper
Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Robert C. Durbeck
IEEE TACON
Daniel M. Bikel, Vittorio Castelli
ACL 2008
Khaled A.S. Abdel-Ghaffar
IEEE Trans. Inf. Theory