Modeling polarization for Hyper-NA lithography tools and masks
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
Thin-film CuIn(Se,S)2 (i.e., CIS) absorbers have been solution-deposited using a hydrazine-based approach that offers the potential to significantly lower the fabrication cost for CIS solar cells. In this method, metal chalcogenides are completely dissolved in hydrazine, forming a homogeneous precursor solution. Film deposition is demonstrated by spin-coating of the precursor solution onto various substrates, including Mo-coated glass and thermally oxidized silicon wafers. Using this approach, no postdeposition anneal in a toxic Se or S-containing environment is needed to obtain CIS films. Instead, only a simple heat-treatment in an inert atmosphere is required, resulting in CIS films with good crystallinity. Bandgap tuning can readily be achieved by varying the amount of S incorporated into the film. Complete CIS devices with glass/Mo/CIS/CdS/i-ZnO/ITO structure are fabricated using absorbers produced via this hydrazine-based approach. Air Mass 1.5G power conversion efficiencies of as high as 12.2% have been achieved, demonstrating that this new approach has great potential as a low-cost alternative for high-efficiency CIS solar cell production. © 2009 American Chemical Society.
Kafai Lai, Alan E. Rosenbluth, et al.
SPIE Advanced Lithography 2007
H.D. Dulman, R.H. Pantell, et al.
Physical Review B
L.K. Wang, A. Acovic, et al.
MRS Spring Meeting 1993
Thomas H. Baum, Carl E. Larson, et al.
Journal of Organometallic Chemistry